The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 03, 2023

Filed:

Jun. 05, 2020
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Seiji Miura, Tokyo, JP;

Hiroki Uryu, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/042 (2014.01); B23K 26/02 (2014.01); B23K 26/08 (2014.01); H01L 21/67 (2006.01); H01L 21/268 (2006.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
B23K 26/042 (2015.10); B23K 26/02 (2013.01); B23K 26/08 (2013.01); H01L 21/67092 (2013.01); H01L 21/67115 (2013.01); H01L 21/268 (2013.01); H01L 21/78 (2013.01);
Abstract

A laser oscillator support table includes a base, a fixed plate supported over the base with intermediary of a Z-axis direction movement unit, and a Y-axis direction moving plate mounted on the fixed plate, movable orthogonal to an X-axis direction. An optical path direction of the beam emitted from a laser oscillator supported by the laser oscillator support table is defined as the X-axis direction. The laser oscillator support table further includes a rotating plate that is mounted on the Y-axis direction moving plate rotatably around a rotation center pin fixed to the Y-axis direction moving plate and supports the laser oscillator, a Y-axis direction movement unit that moves the Y-axis direction moving plate in the Y-axis direction, and a rotational movement unit that rotates the rotating plate around the rotation center pin in a plane parallel to a plane formed by the X-axis direction and the Y-axis direction.


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