The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Jul. 18, 2022
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Yan Liu, Lexington, MA (US);
Yuxuan Liu, Wayland, MA (US);
Chandra Venkatraman, Tyngsboro, MA (US);
Carlo Waldfried, Middleton, MA (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/06 (2006.01); B05D 1/02 (2006.01); B05D 3/02 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
B05D 3/06 (2013.01); B05D 1/02 (2013.01); B05D 3/0254 (2013.01); H01L 21/6833 (2013.01);
Abstract
Described are techniques for applying a cured polymeric blanket coating onto a surface, specifically for applying a blanket-coated cured polymeric coating onto a surface of a substrate that is useful as an electrostatic chuck for processing semiconductor wafers.