The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
Oct. 06, 2020
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventor:
Tanuj Aggarwal, San Jose, CA (US);
Assignee:
Cymer, LLC, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/10 (2006.01); H01S 3/13 (2006.01); G03F 7/00 (2006.01); H01S 3/00 (2006.01); H01S 3/225 (2006.01); H01S 3/134 (2006.01); H01S 3/23 (2006.01);
U.S. Cl.
CPC ...
H01S 3/10046 (2013.01); G03F 7/70025 (2013.01); G03F 7/70575 (2013.01); H01S 3/0014 (2013.01); H01S 3/10069 (2013.01); H01S 3/134 (2013.01); H01S 3/1305 (2013.01); H01S 3/225 (2013.01); H01S 3/2308 (2013.01);
Abstract
Methods and apparatus for controlling laser firing timing and hence bandwidth in a laser capable of operating at any one of multiple repetition rates.