The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2023

Filed:

Mar. 11, 2021
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Junji Kataoka, Kawasaki Kanagawa, JP;

Tomomasa Ueda, Yokohama Kanagawa, JP;

Shushu Zheng, Kawasaki Kanagawa, JP;

Nobuyoshi Saito, Tokyo, JP;

Keiji Ikeda, Tokyo, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 29/786 (2006.01); H01L 29/22 (2006.01); H10B 12/00 (2023.01);
U.S. Cl.
CPC ...
H01L 29/42356 (2013.01); H01L 29/22 (2013.01); H01L 29/42372 (2013.01); H01L 29/7869 (2013.01); H10B 12/30 (2023.02);
Abstract

A semiconductor device according to an embodiment includes an oxide semiconductor layer, a gate electrode, and the gate electrode, a first electrode electrically connected to the oxide semiconductor layer, a second electrode electrically connected to the oxide semiconductor layer, a first conductive layer provided at at least one position between the oxide semiconductor layer and the first electrode and between the oxide semiconductor layer and the second electrode, the first conductive layer containing a first metal element, a first element different from the first metal element, and one of oxygen (O) or nitrogen (N), and a second conductive layer between the oxide semiconductor layer and the first conductive layer, the second conductive layer containing oxygen (O) and a second element different from both of the first metal element and the first element. The gate electrode is between the first electrode and the second electrode in the first direction.


Find Patent Forward Citations

Loading…