The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2023

Filed:

Sep. 23, 2021
Applicant:

Yangtze Memory Technologies Co., Ltd., Wuhan, CN;

Inventor:

Chao Sun, Wuhan, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0653 (2013.01); H01L 29/0611 (2013.01); H01L 29/66681 (2013.01); H01L 29/7816 (2013.01); H01L 21/762 (2013.01);
Abstract

The present disclosure provides a method for manufacturing a high voltage semiconductor device which includes providing a semiconductor substrate; forming at least one first isolation structure and at least one second isolation structure in the semiconductor substrate; forming a gate structure on the semiconductor substrate and at a side of the at least one first isolation structure; and forming at least one first drift region in the semiconductor substrate at a side of the gate structure, in which a bottom of the at least one first isolation structure and a bottom of the at least one second isolation structure are deeper than a bottom of the first drift region.


Find Patent Forward Citations

Sun, Chao. (2023). Manufacturing method of high-voltage semiconductor device with increased breakdown voltage (U.S. Patent No. 11769794). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11769794

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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