The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2023

Filed:

Dec. 23, 2019
Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Hideto Dohi, Tokyo, JP;

Yoshinobu Ootaka, Tokyo, JP;

Masashi Inada, Tokyo, JP;

Hideyuki Kazumi, Tokyo, JP;

Hideo Kashima, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/141 (2006.01); H01J 37/147 (2006.01); H01J 37/153 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/1413 (2013.01); H01J 37/1474 (2013.01); H01J 37/153 (2013.01); H01J 2237/032 (2013.01); H01J 2237/1534 (2013.01);
Abstract

Provided are a multistage-connected multipole and a charged particle beam device that can be produced with precision in machining without requiring precision in brazing between a pole and an insulation material. This multi-stage connected multipolecomprises: a plurality of poles Q-Qthat are arranged along the optical-axis direction of a charged particle beam, and that have cutouts Non surfaces facing each other; and braces P-Pthat are arranged between the plurality of poles Q-Qand are made of an insulator. The poles Q-Qand the braces P-Pare joined by fitting the braces P-Pinto the cutouts N and applying brazing so as to be interposed by a bonding material.


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