The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2023

Filed:

Apr. 20, 2020
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Akiyoshi Suzuki, Oyama, JP;

Osamu Wakabayashi, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 19/00 (2006.01); G01J 1/42 (2006.01); G02B 5/00 (2006.01); G02B 26/08 (2006.01); G02B 27/09 (2006.01); G02B 27/30 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01); H01S 3/097 (2006.01);
U.S. Cl.
CPC ...
G02B 19/0019 (2013.01); G01J 1/4257 (2013.01); G02B 5/001 (2013.01); G02B 19/0047 (2013.01); G02B 26/0816 (2013.01); G02B 27/0927 (2013.01); G02B 27/0955 (2013.01); G02B 27/30 (2013.01); G03F 7/2006 (2013.01); G03F 7/2008 (2013.01); H01L 21/0275 (2013.01); G01J 2001/4261 (2013.01); H01S 3/097 (2013.01);
Abstract

A laser radiation system according to a viewpoint of the present disclosure includes a first optical system configured to convert a first laser flux into a second laser flux, a multimirror device including mirrors, configured to be capable of controlling the angle of the attitude of each of the mirrors, and configured to divide the second laser flux into laser fluxes and reflect the laser fluxes in directions to produce the divided laser fluxes, a Fourier transform optical system configured to focus the divided laser fluxes, and a control section configured to control the angle of the attitude of each of the mirrors in such a way that the Fourier transform optical system superimposes the laser fluxes, which are divided by the mirrors separate from each other by at least a spatial coherence length of the second laser flux, on one another.


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