The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2023

Filed:

Feb. 19, 2018
Applicant:

Plansee Composite Materials Gmbh, Lechbruck Am See, DE;

Inventors:

Peter Polcik, Lechbruck Am See, DE;

Szilard Kolozsvari, Lechbruck Am See, DE;

Paul Mayrhofer, Neckenmarkt, AT;

Helmut Riedl, Kirchberg Am Walde, AT;

Assignee:

Plansee Composite Materials GmbH, Lechbruck am See, DE;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C22C 14/00 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); H01J 37/34 (2006.01); B22F 3/17 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); C22C 14/00 (2013.01); C23C 14/0036 (2013.01); C23C 14/0641 (2013.01); H01J 37/3426 (2013.01); B22F 3/17 (2013.01); B22F 2301/205 (2013.01);
Abstract

A target for use in a physical vapor deposition process includes a matrix composed of a composite material selected from the group consisting of aluminum-based material, titanium-based material and chromium-based material and all combinations thereof. The matrix is doped with doping elements and the doping elements are embedded as constituents of ceramic compounds or aluminum alloys in the matrix. The doping elements are selected from the group of the lanthanides: La, Ce, Nb, Sm and Eu. A process for producing such a target and a use of such a target in a physical vapor deposition process are also provided.


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