The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
Mar. 20, 2020
Applicant:
Ebara Corporation, Tokyo, JP;
Inventor:
Mitsuru Miyazaki, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23Q 15/12 (2006.01); B25B 11/00 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B23Q 15/12 (2013.01); B25B 11/00 (2013.01); H01L 21/67 (2013.01); H01L 21/67051 (2013.01); H01L 21/67259 (2013.01); H01L 21/6875 (2013.01); H01L 21/67023 (2013.01);
Abstract
A substrate support apparatushas a support partfor supporting a substrate W; a moving partwhich is adapted to abut on the support partand to move the support partalong an axis direction; a fluid pipeat least a part of which is provided in the moving part, through which fluid flows and an outlet portof which is covered by the support partwhen the moving partabuts on the support part; and a detection partwhich detects a state of the fluid.