The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Jun. 09, 2021
Applicant:
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Inventor:
Chung-Chieh Lee, Taipei, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/02 (2006.01); H01L 21/3063 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3063 (2013.01); H01L 21/3085 (2013.01); H01L 21/3086 (2013.01);
Abstract
The present disclosure provides an etching solution, including an ionic strength enhancer having an ionic strength greater than 10M in the etching solution, wherein the ionic strength enhancer includes Li, Na, K, Mg, Ca, N(CH), or N(CH), a solvent, and an etchant.