The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
May. 11, 2021
United Microelectronics Corp., Hsin-Chu, TW;
Hao-Hsuan Chang, Kaohsiung, TW;
Da-Jun Lin, Kaohsiung, TW;
Yao-Hsien Chung, Kaohsiung, TW;
Ting-An Chien, Tainan, TW;
Bin-Siang Tsai, Changhua County, TW;
Chih-Wei Chang, Tainan, TW;
Shih-Wei Su, Tainan, TW;
Hsu Ting, Tainan, TW;
Sung-Yuan Tsai, Yunlin County, TW;
UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;
Abstract
A fabricating method of reducing photoresist footing includes providing a silicon nitride layer. Later, a fluorination process is performed to graft fluoride ions onto a top surface of the silicon nitride layer. After the fluorination process, a photoresist is formed to contact the top surface of the silicon nitride layer. Finally, the photoresist is patterned to remove at least part of the photoresist contacting the silicon nitride layer.