The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
May. 29, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventor:
Alessandro Polo, Arendonk, BE;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/07 (2006.01); G01N 29/22 (2006.01); G01N 29/24 (2006.01); G01N 29/28 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
G01N 29/07 (2013.01); G01N 29/221 (2013.01); G01N 29/2418 (2013.01); G01N 29/28 (2013.01); G03F 9/7053 (2013.01); G03F 9/7084 (2013.01); G03F 9/7088 (2013.01); G01N 2291/044 (2013.01); G01N 2291/2697 (2013.01);
Abstract
A sensor apparatus comprising an acoustic assembly arranged to transmit an acoustic signal to a substrate and receive at least part of the acoustic signal after the acoustic signal has interacted with the substrate, a transducer arranged to convert the at least part of the acoustic signal to an electronic signal, and, a processor configured to receive the electronic signal and determine both a topography of at least part of the substrate and a position of a target of the substrate based on the electronic signal. The sensor apparatus may for part of a lithographic apparatus or a metrology apparatus.