The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Feb. 19, 2015
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Thomas H. Baum, New Fairfield, CT (US);
Scott L. Battle, Cedar Park, TX (US);
John M. Cleary, New Fairfield, CT (US);
David W. Peters, Kingsland, TX (US);
Philip S.H. Chen, Bethel, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); C07F 15/06 (2006.01); C23C 16/18 (2006.01); C23C 16/16 (2006.01); C23C 16/06 (2006.01); C23C 16/455 (2006.01); C23C 16/48 (2006.01);
U.S. Cl.
CPC ...
C23C 16/50 (2013.01); C07F 15/06 (2013.01); C23C 16/06 (2013.01); C23C 16/16 (2013.01); C23C 16/18 (2013.01); C23C 16/45525 (2013.01); C23C 16/483 (2013.01);
Abstract
Cobalt precursors are described, having application for vapor deposition of cobalt on substrates, such as in atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes for forming interconnects, capping structures, and bulk cobalt conductors, in the manufacture of integrated circuitry and thin film products.