The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Jan. 27, 2020
Asml Netherlands B.v., Veldhoven, NL;
Robert Jay Rafac, Encinitas, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus includes: a diagnostic system configured to diagnostically interact with a current target () traveling along a trajectory (TR) and before the current target enters a target space; a first detection apparatus () configured to detect first light; a second detection apparatus () configured to detect second light; and a control system () in communication with the first and second detection apparatuses. The first light includes: light () produced from an interaction between the current target and the diagnostic system, and light () emitted from a plasma produced by a previous target. The second light includes the light () emitted from the plasma produced by the previous target. The control system () is configured to: produce an analysis signal based on first and second signals produced from respective outputs of the first and second detection apparatuses; and estimate a property of the current target based on the produced analysis signal.