The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Jun. 19, 2020
Applicant:
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Inventors:
Pradip Girdhar Chaudhari, Hsinchu, TW;
Che-Hui Lee, Taipei, TW;
Chih-Cheng Wei, Hsinchu, TW;
Wen-Cheng Yang, Hsinchu, TW;
Chyi-Tsong Ni, Hsin-Chu, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01C 3/08 (2006.01); G01S 7/497 (2006.01); G01S 7/481 (2006.01); G01S 17/06 (2006.01);
U.S. Cl.
CPC ...
G01S 7/4972 (2013.01); G01S 7/4812 (2013.01); G01S 17/06 (2013.01);
Abstract
A target measurement device is provided. The target measurement device includes a fixing ring, a main body, and a transceiver. The fixing ring has a first surface. The main body is over the first surface of the fixing ring. The transceiver is coupled to the main body. The transceiver is at least movable between a center of the fixing ring to an edge of the fixing ring from a top view perspective. A method for measuring a target is also provided.