The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Sep. 24, 2020
Nikon Corporation, Tokyo, JP;
Takashi Nagata, Castro Valley, CA (US);
Ting-Chien Teng, Fremont, CA (US);
Kiyoshi Nozaki, Sagamihara, JP;
Yohei Konishi, Tokyo, JP;
Abstract
A slurry analysis system () for estimating a first characteristic of a slurry () having a plurality of particles () suspended in a dispersion medium () can include a flow restriction assembly (); a sensor assembly () that senses a sensed condition of the slurry () as it flows through the flow restriction assembly (); and a control and analysis system () that estimates the first characteristic of the slurry () based on the sensed condition. Further, the control and analysis system () can select a selected clogging behavior using the sensed condition, and estimate the first characteristic based on the selected clogging behavior.