The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Aug. 04, 2021
Applicant:
Versum Materials Us, Llc, Tempe, AZ (US);
Inventors:
Neil Osterwalder, Carlsbad, CA (US);
Sergei V. Ivanov, Schnecksville, PA (US);
Assignee:
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 5/00 (2006.01); B01D 7/00 (2006.01);
U.S. Cl.
CPC ...
C07F 5/00 (2013.01); B01D 7/00 (2013.01);
Abstract
Lanthanide compounds for vapor deposition having ≤50.0 ppm, ≤30.0 ppm, or ≤10.0 ppm of all halide impurity combined is provided. The purification systems and methods are also provided.