The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2023

Filed:

Feb. 17, 2021
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Atsushi Ueki, Tokyo, JP;

Nobuyuki Kimura, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/06 (2014.01); B23K 26/53 (2014.01); H01L 21/683 (2006.01); B23K 26/08 (2014.01); H01L 21/78 (2006.01); B23K 26/0622 (2014.01);
U.S. Cl.
CPC ...
B23K 26/0665 (2013.01); B23K 26/0622 (2015.10); B23K 26/08 (2013.01); B23K 26/53 (2015.10); H01L 21/6836 (2013.01); H01L 21/78 (2013.01);
Abstract

A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator, a condenser lens that condenses a laser beam emitted from the laser oscillator, and a phase modulation element arranged between the laser oscillator and the condenser lens. Individual differences of the condenser lens are prevented by applying, to the phase modulation element, voltages corresponding to a combined pattern of a shape correction pattern which is configured to correct differences between an actual shape and design values of the condenser lens, and an adjustment pattern which is configured to adjust optical characteristics of the laser beam at each processing point.


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