The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Jan. 22, 2020
Applicant:
Kctech Co., Ltd., Anseong-si, KR;
Inventor:
Dong Min Kim, Seoul, KR;
Assignee:
KCTECH CO., LTD., Anseong-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); C23C 16/44 (2006.01); H01L 21/67 (2006.01); B24B 57/02 (2006.01); B05C 11/06 (2006.01); B05D 3/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67739 (2013.01); B05C 11/06 (2013.01); B24B 57/02 (2013.01); C23C 16/4412 (2013.01); H01L 21/6719 (2013.01); B05D 3/04 (2013.01); H01L 21/67051 (2013.01); Y10S 55/29 (2013.01); Y10S 414/139 (2013.01);
Abstract
The present disclosure relates to a substrate processing apparatus, and more specifically, to a substrate processing apparatus capable of blocking the introduction of external air and external particles into a chamber by forming an air curtain at a loading/unloading part when the chamber is open. The substrate processing apparatus of the present disclosure includes a chamber in which a space is formed, and a fluid injection part configured to inject a fluid from an outer side of a substrate loading/unloading part of the chamber through which a substrate is loaded and unloaded.