The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Aug. 25, 2021
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventor:
Leyla Ramin, San Diego, CA (US);
Assignee:
Cymer, LLC, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 61/16 (2006.01); H01J 61/073 (2006.01); H01J 9/14 (2006.01); H01S 3/038 (2006.01); H01S 3/225 (2006.01);
U.S. Cl.
CPC ...
H01J 61/0735 (2013.01); H01J 9/14 (2013.01); H01J 61/16 (2013.01); H01S 3/0381 (2013.01); H01S 3/0382 (2013.01); H01S 3/0388 (2013.01); H01S 3/2251 (2013.01); H01S 3/2256 (2013.01); H01S 3/2258 (2013.01);
Abstract
A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.