The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Jan. 18, 2022
Applicant:
Nuflare Technology, Inc., Yokohama, JP;
Inventors:
Satoshi Nakahashi, Yokohama, JP;
Nobuo Miyamoto, Yokohama, JP;
Takahito Nakayama, Chigasaki, JP;
Shunji Shinkawa, Fujisawa, JP;
Assignee:
NUFLARE TECHNOLOGY, INC., Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/073 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/073 (2013.01); H01J 37/3174 (2013.01); H01J 2237/06333 (2013.01);
Abstract
An electron beam writing apparatus comprising, a cathode configured to emit an electron beam, a condition controller configured to change a condition under which the electron beam is emitted from the cathode in a plurality of ways, and a prediction unit configured to predict a life span of the cathode based on a temporal change in an amount of fluctuation of a beam characteristic of the electron beam to a change in the condition when the condition is changed.