The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Sep. 01, 2021
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Narayani Narasimhan, New Delhi, IN;
Ganesh Meenakshisundaram, Austin, TX (US);
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); G06F 18/22 (2023.01);
U.S. Cl.
CPC ...
G06T 7/0006 (2013.01); G01N 21/8851 (2013.01); G01N 21/9501 (2013.01); G06F 18/22 (2023.01); G01N 2021/8887 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Images of semiconductor wafers can be hashed to determine a fixed length hash string for each of the images. Pattern synonyms can be determined from the hash strings. The pattern synonyms can be grouped. A degree of similarity between images in the groups is adjustable via a hamming distance. This can be used for various applications, including determination of latent defects.