The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Feb. 12, 2021
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Inventor:
Keiichi Ibata, Kawasaki, JP;
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08G 73/06 (2006.01); C09D 179/04 (2006.01); H01L 21/027 (2006.01); G03F 7/11 (2006.01); H01L 21/033 (2006.01);
U.S. Cl.
CPC ...
C08G 73/0672 (2013.01); C09D 179/04 (2013.01); G03F 7/11 (2013.01); H01L 21/0274 (2013.01); H01L 21/0332 (2013.01); H01L 21/0337 (2013.01);
Abstract
A hard-mask forming composition including a resin (P1) having a repeating structure (u1) represented by General Formula (u1-0), wherein Arand Arare aromatic hydrocarbon groups which may have a substituent, Arhas at least one nitrogen atom or oxygen atom, Land Lare each independently a single-bonded or divalent linking group, and X is NHand the like