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H10K 59/121 (2023.01); H01L 29/16 (2006.01); H01L 29/04 (2006.01); H01L 29/786 (2006.01); H10K 50/12 (2023.01); H10K 50/165 (2023.01); H10K 59/123 (2023.01); H10K 71/00 (2023.01);

U.S. Cl.

CPC ...

H10K 59/1213 (2023.02); H01L 29/045 (2013.01); H01L 29/1604 (2013.01); H01L 29/78675 (2013.01); H10K 50/12 (2023.02); H10K 50/165 (2023.02); H10K 59/123 (2023.02); H10K 71/00 (2023.02);

Abstract

A display apparatus includes a substrate, a first thin film transistor on the substrate, the first thin film transistor including an active layer including a source region, a drain region, and a channel region between the source region and the drain region, and a display device on the substrate and electrically connected to the first thin film transistor. The source region, the drain region, and the channel region include a first dopant and a second dopant, the second dopant being different from the first dopant. A concentration of the first dopant in the channel region is less than a concentration of the first dopant in the source region and the drain region.

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