The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2023
Filed:
Dec. 16, 2020
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Paulus Albertus Van Hal, Waalre, NL;
Adrianus Hendrik Koevoets, Mierlo, NL;
Beatriz Seoane De La Cuesta, Eindhoven, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 21/687 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7095 (2013.01); G03F 7/707 (2013.01); G03F 7/70783 (2013.01); H01L 21/6875 (2013.01);
Abstract
A substrate with a backside surface configured to provide a friction switch when the substrate is loaded onto a substrate holder in a substrate-loading cycle, wherein the substrate backside surface has a molecular assembly including at least one high-interaction region and at least one low-interaction region. Further, there is provided methods using such a substrate and methods for creating such a substrate.