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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11739411 B1

PDFFull Text
Date of Patent:
Aug. 29, 2023

Filed:

Nov. 04, 2019

Lattice coat surface enhancement for chamber components

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Lit Ping Lam, Singapore, SG;

Sriskantharajah Thirunavukarasu, Singapore, SG;

Ian Ong, Singapore, SG;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Jennifer Wecker

Assistant Examiner:

Patrick S Ott

Int. Cl.
CPC ...
C23C 14/00 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); C23C 16/44 (2006.01); B81C 1/00 (2006.01); B33Y 80/00 (2015.01); B22F 10/00 (2021.01); B29L 31/18 (2006.01); F27D 1/00 (2006.01); B29L 31/34 (2006.01); F27B 15/06 (2006.01); B29L 31/00 (2006.01); E04B 2/00 (2006.01); F16M 1/08 (2006.01); B01L 1/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0068 (2013.01); B22F 10/00 (2021.01); B33Y 80/00 (2014.12); B81C 1/00373 (2013.01); C23C 16/4404 (2013.01); H01J 37/32477 (2013.01); H01J 37/3488 (2013.01); B01L 1/00 (2013.01); B29L 2031/18 (2013.01); B29L 2031/3481 (2013.01); B29L 2031/7156 (2013.01); E04B 2/00 (2013.01); F16M 1/08 (2013.01); F27B 15/06 (2013.01); F27D 1/0006 (2013.01); H01J 37/3211 (2013.01); H01J 37/32495 (2013.01); H01J 37/32807 (2013.01); Y10T 428/139 (2015.01);
Abstract

Disclosed are embodiments for an engineered feature formed as a part of or on a chamber component. In one embodiment, a chamber component for a processing chamber includes a component part body having unitary monolithic construction. The component part body has an outer surface. An engineered complex surface is formed on the outer surface. The engineered complex surface has a first lattice framework formed from a plurality of first interconnected laths and a plurality of first openings are bounded by three or more laths of the plurality of laths.

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