The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2023
Filed:
Sep. 28, 2018
Kla Corporation, Milpitas, CA (US);
Yu Zheng, San Jose, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A light attenuating device includes a housing, a first filter, a first motor configured to move the first filter, and a pneumatic actuator configured to move the first filter to either be in contact with the housing or to not be in contact with the housing. The filter includes multiple slit openings that vary in width such that the amount of light that passes through the multiple slit openings varies as the first filter is moved. The light attenuating device may also include a second filter and a second motor configured to move the second filter. A method of light attenuation is also disclosed that includes adjusting the position of a filter such that a portion of the filter is irradiated by a radiating beam, and while maintaining the irradiation of the portion of the filter, moving the filter to be in contact with a thermally conductive object.