The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2023
Filed:
Apr. 13, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Bindusagar Marath Sankarathodi, San Jose, CA (US);
Zhiyuan Ye, San Jose, CA (US);
Jyothi Rajeevan, Bangalore, IN;
Ala Moradian, Sunnyvale, CA (US);
Zuoming Zhu, Sunnyvale, CA (US);
Errol Antonio C. Sanchez, Tracy, CA (US);
Patricia M. Liu, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.