The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2023

Filed:

Feb. 08, 2021
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Nobuyuki Fukushi, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 51/00 (2006.01); H01L 21/67 (2006.01); B24B 7/22 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B24B 51/00 (2013.01); B24B 7/228 (2013.01); H01L 21/67051 (2013.01); H01L 21/67766 (2013.01); H01L 21/67769 (2013.01); H01L 21/68707 (2013.01);
Abstract

A processing apparatus includes: a selection section that selects two or more components from a plurality of components including a holding table, a processing unit, a robot, a temporary placing unit, a carrying-in mechanism, a cleaning unit, and a carrying-out mechanism; and a control unit that handles a workpiece at part of routes that correspond to the components selected by the selection section, of the routes for passage of the workpiece at the time of processing the workpiece full-automatically by use of the plurality of components.


Find Patent Forward Citations

Fukushi, Nobuyuki. (2023). Processing apparatus (U.S. Patent No. 11731239). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11731239

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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