The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2023
Filed:
Nov. 09, 2021
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Jad Ali Jaber, Westford, MA (US);
Saksatha Ly, Lexington, MA (US);
James Hamzik, Billerica, MA (US);
Testu Kohyama, Tokyo, JP;
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 67/00 (2006.01); B01D 69/02 (2006.01); B01D 71/26 (2006.01); B01D 71/78 (2006.01); B01D 71/82 (2006.01); B01J 20/26 (2006.01); B01J 20/28 (2006.01); B01J 20/32 (2006.01); C07C 45/78 (2006.01); C08J 5/22 (2006.01); G03F 7/027 (2006.01);
U.S. Cl.
CPC ...
B01D 67/0088 (2013.01); B01D 69/02 (2013.01); B01D 71/26 (2013.01); B01D 71/78 (2013.01); B01D 71/82 (2013.01); B01J 20/267 (2013.01); B01J 20/28035 (2013.01); B01J 20/3208 (2013.01); B01J 20/3282 (2013.01); C07C 45/786 (2013.01); C08J 5/2243 (2013.01); G03F 7/027 (2013.01); B01D 2323/30 (2013.01); B01D 2325/14 (2013.01); B01D 2325/16 (2013.01); C08J 2333/26 (2013.01);
Abstract
The present disclosure provides a porous polymeric membrane that is coated with a cross-linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.