The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

H01L 27/11582 (2017.01); H10B 43/27 (2023.01); H10B 41/10 (2023.01); H10B 41/27 (2023.01); H10B 41/35 (2023.01); H10B 43/10 (2023.01); H10B 43/35 (2023.01);

U.S. Cl.

CPC ...

H10B 43/27 (2023.02); H10B 41/10 (2023.02); H10B 41/27 (2023.02); H10B 41/35 (2023.02); H10B 43/10 (2023.02); H10B 43/35 (2023.02);

Abstract

A method for forming a staircase structure of a memory device includes the following operations. A first number of divisions are formed at different depths along a first direction in a stack structure and a trench structure between adjacent divisions, the stack structure comprising interleaved sacrificial material layers and dielectric material layers. A plurality of stairs are formed along a second direction. Each of the plurality of stairs includes the first number of divisions, and each of the divisions includes a first number of sacrificial portions. The second direction is perpendicular to the first direction. An insulating portion is formed in the trench structure. A top sacrificial portion is formed on a top surface of each of the first number of divisions and in contact with the insulating portion. The top sacrificial portion is replaced with a conductor portion through a slit structure in the insulating portion and in contact with the top sacrificial portion.

Find Patent Forward Citations

Zhou, Yuting. (2023). Multi-division staircase structure of three-dimensional memory device and method for forming the same (U.S. Patent No. 11729977). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11729977

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