The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Jul. 14, 2021
Winbond Electronics Corp., Taichung, TW;
Chih-Hao Lin, Taichung, TW;
WINBOND ELECTRONICS CORP., Taichung, TW;
Abstract
A method for manufacturing a dynamic random access memory includes: forming a buried bit line in a substrate; forming a plurality of buried word lines in the substrate, wherein the bottom surfaces of the buried word lines are higher than the top surface of the buried bit line; forming a bit line contact structure on the buried bit line; forming a through hole passing through the bit line contact structure, wherein the bit line contact structure is not in direct contact with the buried bit line, and the material of the bit line contact structure is different from the material of the buried bit line; forming a conductive plug between the bit line contact structure and the buried bit line; and forming a capacitor structure on the substrate.