The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Aug. 04, 2022
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Hsin-Yu Chen, Hsinchu, TW;
Chun-Peng Li, Hsinchu, TW;
Chia-Chun Hung, Hsinchu, TW;
Ching-Hsiang Hu, Taipei, TW;
Wei-Ding Wu, Zhubei, TW;
Jui-Chun Weng, Taipei, TW;
Ji-Hong Chiang, Changhua, TW;
Yen Chiang Liu, Hsinchu, TW;
Jiun-Jie Chiou, Hsinchu, TW;
Li-Yang Tu, Hsinchu, TW;
Jia-Syuan Li, Hsinchu, TW;
You-Cheng Jhang, Hsinchu, TW;
Shin-Hua Chen, Hsinchu, TW;
Lavanya Sanagavarapu, Hsinchu, TW;
Han-Zong Pan, Hsinchu, TW;
Hsi-Cheng Hsu, Taichung, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
Disclosed is a method to fabricate a multifunctional collimator structure In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; and a plurality of via holes, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, wherein the substrate has a bulk impurity doping concentration equal to or greater than 1×10per cubic centimeter (cm) and a first thickness, and wherein the bulk impurity doping concentration and the first thickness of the substrate are configured so as to allow the optical collimator to filter light in a range of wavelengths.