The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Jan. 25, 2021
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Jun Hatakeyama, Joetsu, JP;
Tomomi Watanabe, Joetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 381/12 (2006.01); G03F 7/038 (2006.01); C07C 65/10 (2006.01); C07C 61/135 (2006.01); C07C 59/115 (2006.01); C07C 205/58 (2006.01); C07C 63/70 (2006.01); C07C 311/03 (2006.01); C07D 275/06 (2006.01); C07C 309/19 (2006.01); C08F 220/18 (2006.01); C08F 212/14 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 59/115 (2013.01); C07C 61/135 (2013.01); C07C 63/70 (2013.01); C07C 65/10 (2013.01); C07C 205/58 (2013.01); C07C 309/19 (2013.01); C07C 311/03 (2013.01); C07C 381/12 (2013.01); C07D 275/06 (2013.01); C08F 212/24 (2020.02); C08F 220/1806 (2020.02); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01); C07C 2603/62 (2017.05); C07C 2603/74 (2017.05);
Abstract
A resist composition comprising a quencher containing a sulfonium salt having the formula (A).