The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Oct. 11, 2021
Disco Corporation, Tokyo, JP;
Hirotoshi Hoshikawa, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A grinding apparatus includes a chuck table that holds a workpiece through a protective tape, where the protective tape is attached to one surface of an annular frame so as to cover an opening of the annular frame and the workpiece is attached to the protective tape on an inner side of an inner circumferential edge of the opening of the annular frame; a grinding unit for grinding the workpiece; and a frame cleaning unit that cleans the other surface located on a side opposite to the one surface of the annular frame obtained after grinding of the workpiece, and wherein the frame cleaning unit has either: (i) a first cleaning member configured and arranged for making contact with the other surface of the annular frame and having flexibility, or (ii) a second cleaning member that jets at least either gas or liquid from above the other surface of the annular frame.