The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2023
Filed:
Jul. 23, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Yun Mo, Miyagi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01J 37/20 (2006.01); H01L 21/683 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); H01L 21/68785 (2013.01); C23C 16/4586 (2013.01); H01J 37/20 (2013.01); H01L 21/6833 (2013.01);
Abstract
A temperature adjusting device includes a first member and a flow path. The first member has thereon a first surface as a temperature control target. The flow path is formed within the first member along the first surface. A first end of the flow path serves as an inlet opening through which a heat transfer medium is introduced and a second end of the flow path serves as an outlet opening through which the heat transfer medium is discharged. The flow path is formed such that a thermal resistance between the first surface and the flow path increases as the flow path goes from the outlet opening toward the inlet opening.