The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2023
Filed:
Oct. 24, 2020
Semes Co., Ltd., Cheonan-si, KR;
Young Dae Chung, Incheon, KR;
Won Geun Kim, Goyang-si, KR;
Jee Young Lee, Incheon, KR;
Ji Hoon Jeong, Hwaseong-si, KR;
Tae Shin Kim, Suwon-si, KR;
Jung Suk Goh, Hwaseong-si, KR;
Cheng Bin Cui, Hwaseong-si, KR;
Ye Rim Yeon, Hwaseong-si, KR;
SEMES CO., LTD., Cheonan-si, KR;
Abstract
A substrate treatment apparatus includes a substrate support unit, a chemical supply unit supplying a chemical solution onto an upper surface of a substrate supported on the substrate support unit, a laser irradiation unit applying a laser pulse to the substrate to heat the substrate, and a controller controlling the laser irradiation unit to emit the laser pulse such that the substrate is repeatedly heated and cooled to maintain a preset temperature.