The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2023
Filed:
May. 20, 2020
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Charles H. Applegarth, San Luis Obispo, CA (US);
Rocky D. Gipson, San Marcos, CA (US);
Sarah Vogt, Grover Beach, CA (US);
Joshua T. Cook, San Diego, CA (US);
Matthew Browning, San Luis Obispo, CA (US);
Marco Holzner, San Luis Obispo, CA (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/00 (2006.01); B01D 53/04 (2006.01); B01J 20/28 (2006.01); B01J 20/20 (2006.01); B01J 20/08 (2006.01); B01J 20/10 (2006.01);
U.S. Cl.
CPC ...
B01D 53/0438 (2013.01); B01J 20/08 (2013.01); B01J 20/103 (2013.01); B01J 20/20 (2013.01); B01J 20/2808 (2013.01); B01J 20/28061 (2013.01); B01J 20/28064 (2013.01); B01J 20/28066 (2013.01); B01D 2253/102 (2013.01); B01D 2253/104 (2013.01); B01D 2253/108 (2013.01); B01D 2253/306 (2013.01); B01D 2253/308 (2013.01); B01D 2257/706 (2013.01);
Abstract
Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.