The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2023
Filed:
Sep. 30, 2019
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Inventors:
Tsung-Sheng Kuo, Hsin-Chu, TW;
Yi-Fam Shiu, Hsin-Chu, TW;
Eason Chen, Hsin-Chu, TW;
Yang-Ann Chu, Hsin-Chu, TW;
Jiun-Rong Pai, Jhubei, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01); H01L 23/433 (2006.01); H01L 21/60 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); H01L 21/6773 (2013.01); H01L 21/67294 (2013.01); H01L 21/67706 (2013.01); H01L 23/433 (2013.01); H01L 2021/60105 (2013.01);
Abstract
In an embodiment, a system includes: a tool port of a semiconductor processing tool; a processing port with an internal processing port location and an external processing port location; a robot configured to move a die vessel between the internal processing port location and the tool port; and an actuator configured to move the die vessel between the internal processing port location and the external processing port location.