The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2023
Filed:
Jun. 04, 2020
Tokyo Electron Limited, Tokyo, JP;
Katsuyuki Koizumi, Kurokawa-gun Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A thermal regulator for controlling temperature of a substantially circular stage comprising a plurality of first segments and a plurality of second segments in a radial direction and in a circumferential direction, each of the first segments and at least two adjacent second segments defining a set of segments, the thermal regulator includes heaters disposed in the first and second segments, respectively, thermal sensors disposed in the first segments, respectively, a controller configured to control the heaters in response to temperatures determined by the thermal sensors, and a segment switch to switch the second segments to be controlled in conjunction with the first segment in each set of segments.