The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2023
Filed:
Jun. 18, 2020
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Abstract
A resist composition including: a base material component (A), a compound (B1) represented by Formula (b1-1), and a fluorine additive component (F) which contains a fluororesin component (F1) having a constitutional unit (f1) represented by Formula (f-1) and a constitutional unit (f2) represented by Formula (f-2); in Formula (b1-1), Vrepresents a fluorinated alkylene group, Rrepresents a fluorine atom or a hydrogen atom, a total number of fluorine atoms as Vand Ris 2 or 3; in Formula (f-1), Rfrepresents a monovalent organic group having a fluorine atom; in Formula (f-2), Rfrepresents a group represented by Formula (f2-r-1), which is a group containing a polycyclic aliphatic cyclic group.