The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2023

Filed:

Jun. 09, 2022
Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Sebastian Thomas Bauerschmidt, Wendelstein, DE;

Patrick Sebastian Uebel, Marloffstein, DE;

Peter Maximilian Götz, Bavaria, DE;

Assignee:

ASML NETHERLANDS B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/02 (2006.01); G03F 7/20 (2006.01); G01B 11/25 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G02B 6/02328 (2013.01); G02B 6/02366 (2013.01); G03F 7/70008 (2013.01); G01B 11/25 (2013.01);
Abstract

A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.


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