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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11702760 B1

PDFFull Text
Date of Patent:
Jul. 18, 2023

Filed:

Mar. 20, 2018

N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer

Applicant:

Sumco Corporation, Tokyo, JP;

Inventors:

Koichi Maegawa, Tokyo, JP;

Yasuhito Narushima, Tokyo, JP;

Yasufumi Kawakami, Tokyo, JP;

Fukuo Ogawa, Tokyo, JP;

Ayumi Kihara, Tokyo, JP;

Assignee:

SUMCO CORPORATION, Tokyo, JP;

Attorney:

Greenblum & Bernstein, P.L.C.

Primary Examiner:

Hua Qi

Int. Cl.
CPC ...
C30B 15/04 (2006.01); C30B 15/10 (2006.01); C30B 29/06 (2006.01); C30B 35/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C30B 15/04 (2013.01); C30B 15/10 (2013.01); C30B 29/06 (2013.01); C30B 35/002 (2013.01); C30B 35/007 (2013.01); H01L 21/02002 (2013.01);
Abstract

In a producing method of an n-type monocrystalline silicon by pulling up a monocrystalline silicon from a silicon melt containing a main dopant in a form of red phosphorus to grow the monocrystalline silicon, the monocrystalline silicon exhibiting an electrical resistivity ranging from 0.5 mΩcm to 1.0 mΩcm is pulled up using a quartz crucible whose inner diameter ranges from 1.7-fold to 2.3-fold relative to a straight-body diameter of the monocrystalline silicon.

Find Patent Forward Citations

Maegawa, Koichi. (2023). N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer (U.S. Patent No. 11702760). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11702760

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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