The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2023
Filed:
May. 15, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Takeshi Kobayashi, Oshu, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H02K 49/10 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4584 (2013.01); C23C 16/401 (2013.01); C23C 16/45525 (2013.01); C23C 16/45563 (2013.01); H01L 21/68714 (2013.01); H01L 21/68771 (2013.01); H01L 21/68785 (2013.01); H02K 49/102 (2013.01);
Abstract
There is provided a magnetic drive apparatus having a magnetic drive mechanism driven by a magnet. The magnetic drive apparatus includes a magnetizing yoke disposed in the magnetic drive apparatus at a standby position and configured to be moved to magnetize the magnet and a magnetizing yoke holder configured to hold the magnetizing yoke at a magnetizing position for magnetizing the magnet when the magnetic drive mechanism is stopped.