The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2023
Filed:
Mar. 24, 2021
Applicant:
Gelest Technologies, Inc., Morrisville, PA (US);
Inventors:
Barry C. Arkles, Pipersville, PA (US);
Youlin Pan, Langhorne, PA (US);
Fernando Jove, Collingswood, NJ (US);
Assignee:
GELEST, INC., Morrisville, PA (US);
Primary Examiner:
Int. Cl.
CPC ...
C07F 7/21 (2006.01); H01L 21/02 (2006.01); C01B 21/068 (2006.01); C07F 7/02 (2006.01); C08G 77/62 (2006.01);
U.S. Cl.
CPC ...
C07F 7/21 (2013.01); C01B 21/068 (2013.01); C07F 7/025 (2013.01); C08G 77/62 (2013.01); H01L 21/0217 (2013.01); H01L 21/02219 (2013.01); H01L 21/02222 (2013.01); H01L 21/02271 (2013.01); H01L 21/02274 (2013.01);
Abstract
Novel N-alkyl substituted perhydridocyclic silazanes, oligomeric N-alkyl perhydridosilazane compounds, and N-alkylaminodihydridohalosilanes, and a method for their synthesis are provided. The novel compounds may be used to form high silicon nitride content films by thermal or plasma induced decomposition.