The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2023
Filed:
Nov. 16, 2020
Ebara Corporation, Tokyo, JP;
Yu Ishii, Tokyo, JP;
Hirotaka Satori, Tokyo, JP;
Makoto Kashiwagi, Tokyo, JP;
Manato Furusawa, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
Provided is a top ring that ensures uniformly pressing a substrate against a polishing pad. A top ringfor holding a substrate WF includes a base membercoupled to a top ring shaft, an elastic filmthat is mounted to the base memberand forms a pressurization chamberfor pressurizing the substrate WF between the base memberand the elastic film, a substrate suction memberthat includes a porous memberincluding a substrate suction surfacefor suctioning the substrate WF and a pressure reducing portioncommunicating with a pressure reducing unit. The substrate suction memberis held to the elastic film