The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2023
Filed:
Oct. 23, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Nolan L. Zimmerman, Kalispell, MT (US);
Charles Sharbono, Whitefish, MT (US);
Gregory J. Wilson, Kalispell, MT (US);
Paul R. McHugh, Kalispell, MT (US);
Paul Van Valkenburg, Whitefish, MT (US);
Deepak Saagar Kalaikadal, Kalispell, MT (US);
Kyle M. Hanson, Kalispell, MT (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Electroplating systems may include an electroplating chamber. The systems may also include a replenish assembly fluidly coupled with the electroplating chamber. The replenish assembly may include a first compartment housing anode material. The first compartment may include a first compartment section in which the anode material is housed and a second compartment section separated from the first compartment section by a divider. The replenish assembly may include a second compartment fluidly coupled with the electroplating chamber and electrically coupled with the first compartment. The replenish assembly may also include a third compartment electrically coupled with the second compartment, the third compartment including an inert cathode.