The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2023
Filed:
Nov. 15, 2018
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Frederik Westergaard Østerberg, Hellerup, DK;
Dirch Hjorth Petersen, Herlev, DK;
Henrik Hartmann Henrichsen, Copenhagen, DK;
Alberto Cagliani, Copenhagen, DK;
Ole Hansen, Hørsholm, DK;
Peter Folmer Nielsen, Harlev, DK;
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 1/067 (2006.01); G01K 7/16 (2006.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
G01R 1/06794 (2013.01); G01K 7/16 (2013.01); G01R 1/06727 (2013.01);
Abstract
A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.