The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2023
Filed:
Jul. 16, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Alexander Jansen, San Jose, CA (US);
Keith A. Miller, Mountain View, CA (US);
Prashanth Kothnur, San Jose, CA (US);
Martin Riker, Milpitas, CA (US);
David Gunther, Santa Clara, CA (US);
Emily Schooley, Mountain View, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/354 (2013.01); C23C 14/3407 (2013.01); C23C 14/3471 (2013.01);
Abstract
Apparatus and methods for controlling plasma profiles during PVD deposition processes are disclosed. Some embodiments utilize EM coils placed above the target to control the plasma profile during deposition.