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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11691111 B1

PDFFull Text
Date of Patent:
Jul. 04, 2023

Filed:

Apr. 07, 2020

Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content

Applicant:

Mks Instruments, Inc., Andover, MA (US);

Inventors:

Ulrich Alfred Brammer, Berlin, DE;

Johannes Seiwert, Berlin, DE;

Christiane Le Tiec, Berlin, DE;

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:

Cesari and McKenna, LLP

Primary Examiner:

Robert A Hopkins

Int. Cl.
CPC ...
B01D 19/00 (2006.01); B01F 23/23 (2022.01); B01F 23/232 (2022.01); B01F 23/80 (2022.01); B01F 35/21 (2022.01); B01F 35/221 (2022.01); B01F 35/75 (2022.01); B01F 23/237 (2022.01); B01F 101/58 (2022.01);
U.S. Cl.
CPC ...
B01F 23/2322 (2022.01); B01D 19/00 (2013.01); B01D 19/0005 (2013.01); B01D 19/0031 (2013.01); B01D 19/0068 (2013.01); B01F 23/23 (2022.01); B01F 23/803 (2022.01); B01F 35/2113 (2022.01); B01F 35/2213 (2022.01); B01F 35/2217 (2022.01); B01F 35/7544 (2022.01); B01F 23/2376 (2022.01); B01F 2101/58 (2022.01);
Abstract

Systems and methods are described for supplying a rinsing liquid including ultrapure water and an ammonia gas. The system includes an ultrapure water source and a gas mixture source in fluid communication with a contactor. The gas mixture includes ammonia gas and a carrier gas. The system includes a control unit configured to adjust a flow rate of the ultrapure water source such that an operational pressure of the contactor remains below a pressure threshold. The system includes a compressor configured to remove a residual transfer gas out of the contactor. The contactor generates a rinsing liquid having ultrapure water and a concentration of the ammonia gas dissolved therein. The system includes a pump in fluid communication between the contactor and an outlet. The pump is configured to deliver the rinsing liquid having a gaseous partial pressure below the pressure threshold at the outlet.

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